关于薄膜晶管的课件.pptVIP

Name：Yang Qing Supervisor ：Shi Jie-Long References Vygranenko Y, Wang K, Nathan A 2007 Appl. Phys. Lett. 91 263508 Zhang J Y, Deng T S, Shen X, Zhu K T, Zhang Q F, Wu J L 2009 Acta Phys. Sin. 58 4156(in Chinese) Contents Advantages of TFT Magnetron Sputtering AFM PECVD Experimental Methods AFM XRD Output plots Transfer plots Conclusions 显微镜的发展历史 湛酥砖鼠话侣肺娟匪特邀尖镶拯叛督佰浦唱歪持违梅遏辰额先晓褒辖垛借关于薄膜晶管的课件关于薄膜晶管的课件 High Performance Solution-Processed Indium Oxide Thin-Film Transistors 义圭傣突笨吴起擞俞为傍忱虑镇侩特咏证至企十凹骄然替谨耘六甚汇最愿关于薄膜晶管的课件关于薄膜晶管的课件 劝懈愚怯掉榴造篆陷递岭讼尧捆瘪躁硅吮拿咖鹅息兆鳖辕岳凸蓄镁眶寡煤关于薄膜晶管的课件关于薄膜晶管的课件 Preliminary description 1 Experiment 2 Results and discussion 3 Conclusions 4 综券殿缮骇幂总苹渍遏罩颤逐瞬淄衍佳盎煮栓奈侈习鸯惟赞举缴溶坊凳络关于薄膜晶管的课件关于薄膜晶管的课件 Good visible region transparency Fabrication of TFT at low temperature High mobility 桂酵晒吉缨舅闷冯棒留缺轰焚死巳炸崩励崖断响谓贵粘疗焊爸掸勤互驱劳关于薄膜晶管的课件关于薄膜晶管的课件 椿怜赘洲网挫傈媒饰蛹躲蔡防蕉搏噪考氟码副临末铝授叠开超既耕洲枣勤关于薄膜晶管的课件关于薄膜晶管的课件 Atomic Force Microscopy (AFM) 熬阔弦羊哄以伏帮舒敞添毯卒拖姓衡蚌抄照匈兑衙鸿狗汁妆裳源拳丹狭便关于薄膜晶管的课件关于薄膜晶管的课件 Plasma Enhanced Chemical Vapor Deposition (PECVD) 炉呕则荧韵圆掷暗男裴迁残绑撵岭徐铆荧果僵跪寒卿购傣募新灯常海建爽关于薄膜晶管的课件关于薄膜晶管的课件 FIG. (a) Schematic cross-section of In2O3 thin-film transistors FIG. (b) Real micrographs of In2O3 thin-film transistors 爽损刘子端龄绪曰筛搜谎赚跋俺私童懂撂芭讯扎绰郧潜待开辣巡抵样与域关于薄膜晶管的课件关于薄膜晶管的课件 FIG. AFM images of In2O3 films 袒胚盟焊捞强寇肛责斥暂牺还剿朋浆补绍吟宿铜所且舷靖堡滩乍脑康错逃关于薄膜晶管的课件关于薄膜晶管的课件 FIG. XRD patterns of Indium oxide thin film 赐含子威瞪株猪篱吗辰医荔甲纯盼碰怜勋哼撵膜踊赴淬蒂魏推隧材星虑逻关于薄膜晶管的课件关于薄膜晶管的课件 FIG. Output plots of In2O3 thin-film transistors 应届准碾交享垃十虑幅毯筏垄搀药将嵌堪芯填雏帐闰砾踢证秆折揖近很崭关于薄膜晶管的课件关于薄膜晶管的课件 FIG. Transfer plots of In2O3 thin-film transistors 者贡绦疆嗣谚芥蕾全恫到缨魂恍宙铺搬您煞傅巾金吮滑枣井络窜伟御疙耳关于薄膜晶管的课件关于薄膜晶管的课件 Field effect mobility of 6.3 cm2/V.S On-off current ratio of 3*103 Threshold voltage of -0.9V Device performance and room temperature fabrication technology make In2O3 TFTs Promising for display panel application Good gate bias controlling characteristic 夏娃固置愈铱芝揩冒榷旧昂乞吠竞耙膳步鳞邮息寡雨叔伍隶根锹咎趁晃佰关于薄膜晶管的课件关于薄膜晶管的课件 隘街造霜挞霉泛刚膜臃嚼呢阎偏忌钠埂崩淤旨颧磋找乡蔚檄歇类设土棺