T13-B-国家奈米元件实验室.pptVIP

National Nano Device Laboratories Create for the future 國家奈米元件實驗室垂直爐管技術資料 * 技術資料 垂直爐管 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. * 1、概觀 2、模組介紹 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. * 1、概觀 1.1 A-400 A-400是模組化爐管，設計為處理矽晶片，如半導體元件製造的一部份。 A-400結構由下列組成： ?Work-In-Progress（WIP）station ?Robot section ?Reactor module（two or three） Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. * WIP