mems加速度信号处理电路研究设计本科毕业设计.docVIP

摘 要 MEMS（Micro Electro Mechanical systems即微电子机械系统）是建立在微米/纳米技术基础上的前沿技术，其利用微电子技术和微加工技术制造各种性能优异微型化传感器。 (主要是MEMS技术)的发展，加速度传感器出现了微型化、集成化的发展趋势。信号处理电路是加速度传感器设计需要考虑的一个重要方面，集成化要求信号处理电路和加速度传感器单片集成。 飞行器的加速度可以利用MEMS电容来表征，但该电容仅在p量级MEMS 差分电容 MOS开关 微小信号检测 低噪声放大器  ABSTRACT MEMS（Micro Electro Mechanical systems）is a technology of forward position based on Micro/Nano technology. It uses microelectronic technology and micromachining to manufacture all kinds of excellent micromation sensor. Acceleration sensor is a key mechanical quantity sensor. As the development of the modern science and technology especially the MEMS technology, there is the tendency of accelerometer is micromation and integration. Signal processing circuit is a important facet of design accelerometer. Integration need integrate signal processing circuit and accelerometer sensor in a chip. The acceleration of aerocraft can use MEMS capacitance to depict, but this capacitance is only on pF level. The variation of capacitance corresponding acceleration is more littler. This paper design the signal processing circuit for a differential capacitive closed loop acceleration sensor, it including detect of the signal, wave filtering and amplify. By way of improving the traditional circuit, we cancel the influence of offset voltage and parasitic capacitances. We mainly analyze the noise’effection, and design a low noise amplifier. In the meantime we used the switched capacitor technology, because it is good for restrain the noise and integration. At last, the signal processing circuit can detect the fF level change of capacitance. Keywords: acceleration sensor MEMS differential capacitive MOS switch very small signal detect low noise amplifie 目 录 第一章 绪 论 1 1.1 MEMS系统概述 1 1.2 MEMS加速度计 1 1.2.1 MEMS加速度计的产生与分类 1 1.2.2 国内外MEMS电容式加速度计的研究现状 2 1.3 本论文的主要工作和内容安排 4 第二章 加速度计工作原理和微电容信号处理电路结构 5 2.1 电容式加速度计工作原理 5 2.1.1 MEMS电容式加速度计的工作原理 5 2.1.2 电容的改变方