mems介绍.pptVIP

* Testing Testing is very important for quality and reliability purposes. Testing MEMS devices is unique. Compared to electronic devices, that have electric voltage/current as input and electric voltage/current as output, MEMS devices may have a closed loop from sensors to actuators. The input can be temperature, humidity, loudness, acceleration ... and the output can be various electrical or mechanical responses. Testing MEMS devices require the proper setup of inputs and accurate measure of the outputs. * Basic StructuresBulk Silicon Micromachiningis a subtractive fabrication technique w