特气及毒气Detector侦测器验收标准.docVIP

特气扩充及毒气Detector侦测器扩充验收标准 一.气体管路要求及验收标准 1.气体管路测试标准 气体种类 耐压测试 饱压测试 Helium leak Particle moisture Oxygen GN2 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 -------- ≤ 50pc/cft at 0.1μm -------- -------- SiH4 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at 0.1μm ≤10 Inlet+10ppb ≤10 Inlet+10ppb 0.5%PH3H2 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at 0.1μm ≤10 Inlet+10ppb ≤10 Inlet+10ppb NF3 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at 0.1μm ≤10 Inlet+10ppb ≤10 Inlet+10ppb 0.5%TMBH2 keep the pressure≥ 2hr,and the pressure is 9kg/cm2 keep the pressure≥ 24hr,and the pressure is 8kg/cm2 ≤ 2×10-9atm cc/sec ≤ 20pc/cft at 0.1μm ≤10 Inlet+10ppb ≤10 Inlet+10ppb 2.气体管路验收标准 1.检查各系统管线之路径是否正确。 2.检查各系统管线数量、规格及管径大小是否正确。 3.检查各系统管线是否配置整齐及确实依规定固定。 4.检查各系统管线之标示是否详尽及正确，管线材质是否正确。 5.检查各系统管线之垫片材质是否使用正确，固定是否良好。 6.检查各系统管线之尺寸、高度、路径是否符合设计规格。 7.检查各系统管线之管支撑之间距是否符合规定。 8目视检查各系统管线是否水平或垂直无歪斜。 9竣工数据须包含现场各系统供应之会签纪录及测试记录窗体。 10竣工资料须包含每一气柜之配管示意图。 11竣工数据须包含工程相片。 13竣工资料须包含承包商自主检查表。 14所有竣工图面及竣工数据皆须有电子磁盘档案﹙Auto CAD 2004﹚ 15 检查新增设备功能是否完全按照业主方进行设定，设备位置是否按图纸规划 二 气柜要求及测试标准 功能要求 Name Qty Cyl Purge Pigtail Cylinder connector Auto Guard 0.5%PH3H2 GC 3 2+1 Auto 　 CGA √ NF3 BSGS 1 4Y Auto √ Diss √ SiH4 BSGS 1 4Y Auto √ Diss √ 0.5%TMBH2 GC 3 2+1 Auto 　 CGA √ Name Auto switch Sprinker Touch Screen Controller Exh.sensor Process Filter 0.5%PH3H2 GC √ √ √ PLC √ Pre40μm Post0.003 μm NF3 BSGS √ √ √ PLC √ Pre40μm Post0.003 μm 0.5%TMBH2 GC √ √ √ PLC √ Pre40μm Post0.003 μm SiH4 BSGS 　 √ √ PLC √ Pre40μm Post0.003 μm Name Panel piping size Local Scubber Test port UV/IR Excess Flow Switch Flow Meter Display on Screen 0.5%PH3H2 GC 　 √ √ √ √ √ NF3 BSGS 　 　 √ √ 　 √ SiH4 BSGS 　 　 √ √ 　 √