OpTection膜厚测试专家.pptVIP

Op-Tection膜厚测试专家 * Thickness measurements White light interference 白光干涉是以使用多年的測厚原理, 之前多用於半導體及TFT製程中, 但準確性也較紅外線及X 射線 BATA Guage 好的多.因為極為昂貴， 所以在塗佈業並佈那麼普遍,近年來艾恩迪致力於干涉式側厚移開發病與德國合作多年將成本減至最低， 因此近年來在精密塗佈業的裝機量也遠超紅外線及bata. 測量膜厚使用干涉式的優點是 空間節省 較不易受位置變化影響如傾斜上下震動 速度較快 可量多層厚度，包含底材 價格以合理化 備品維修便宜 無需執照及特別認證人員 white light spectrometer n d TFM 膜厚量测原理 Inteference of multiple reflected light = f (入射光角度, 波長, 材料折射率n, 膜厚 d) 利用反射光的干涉來決定透明涂膜的厚度 与x-ray 量测电镀层膜厚原理相似, 光源不同 透明涂膜 底材 RD-TFM 膜厚量測原理 Blue line : 底材的反射光波形 (blank) Red line : 經由薄膜干涉的反射光波形 程式計算出的膜厚 (n) 厚度是由標準 FFT 公式計算 反射光譜 Reflection Spectrum 能量光譜 Power Spectrum FFT 理論背景 雙層厚度檢測 Example 一般雙層厚度所顯示的波形 ? PC 底材及貼合膠厚度分開檢測出來 ? 底材厚度 583.89 μm ? 貼和膠厚度 48.35 μm Spectrometer To perform color and thickness measurements, reflection and transmission spectra of a sample must be collected. The actual spectrum is generated by disintegrating the received light in its wavelength components. For this a spectrometer is used. A diffractive optical setup, called monochromator, separates the different wavelengths, which are then recorded by an array for further signal processing. A = entrance slit with FSMA 905 adapter B = collimating achromatic lens C = holographic diffraction grating D = focussing achromatic lens E = diode line array (Si* or InGaAs** depending on the application) * Si = Silicon ** InGaAs = Indium Gallium Arsenide A B C D E Spectroscopy 理論背景 光譜的量測原理 = 由多波長光譜分析獲得資料 methods for thickness measurement of thin coatings 薄膜厚度檢測原理使反射方式 - a spectrometer - a halogen light source - an optical y-fiber (quartz) a reflection measurement head 接下頁 Spectroscopy Measuring Setup To achieve optimal performance the measuring heads are aligned in standard optimised positions for color and thickness measurement. The transmission setup consists of one collimating head and one focussing head. The sample is aligned under an angle to guarantee for the most stabile possible results. The reflect