纳米技术与系统5-2纳米计量技术-浙江大学光电科学与工程学院.pptVIP

STM images of HOPG and test sample are simul-taneously scanned by one single XY scanner. The length in test sample image could be measured by counting the number of HOPG lattices. DTU－STM获得的原子图像及纳米计量结果 （a）Reference side （b）Test side reference unit test unit Abbe offset scanner reference unit test unit Abbe offset scanner (a) (b) ??? ??? 各种形式的DTU－STM系统 各种形式的DTU－STM系统 L STM image of reference Sample (periodic features) STM image of test sample reference unit test unit XY scanner test sample reference sample Dual imaging unit STM－AFM A DTU-STM is only capable of measuring electrically conductive samples. Before surface measurements of non-conductor samples, a thin film of conductive material should be deposited onto the sample surface. This process is troublesome and undoubtedly changes the original structure of sample surface. For direct measurement of non-conductor samples, we have further developed a dual imaging unit STM-AFM for length measurement based on standard reference scales. 9.4 双元STM—AFM AFM STM 双元STM—AFM原理示意图 参考标样 被测样品 (a) (b) 以HOPG作为尺度标准的纳米计量 (a) (b) Dual imaging unit AFM The system incorporates two AFM units and one single XY scanner. The reference unit and the test unit are horizontally set in parallel with each other. Their probes with Z piezos and tips are installed at the same height. Such a setup can significantly reduce Abbe’s errors, i.e., errors due to geometric asymmetry, even if the scanner is slightly twisting. Samples with periodic features such as an alumina film and a grating are used as reference scales, respectively, for nanometer and micron order measurement. 40/80 9.5 双元AFM PZ1 reference sample XY Scanner PZ2 test sample tip 1 tip 2 reference image test image L 双元AFM原理示意图 * * 浙江大学研究生课程—纳米技术与系统 第九章 基于STM/AFM的纳米计量技术 浙江大学 光电科学与工程学院 2016-03-28 章海军 9.1 计量的定义 9.2 纳米计量的任务和标准 9.3 双元扫描隧道显微镜DTU-STM 9.4 双元STM-AFM 9.5 双元AFM 9.6 干涉计量型AFM 第九章 基于STM/AFM的纳米计量技术 计量，是实现单位统一和量值准确可靠的测量。它属于测量，源于测量，而又严 于一般测量，是测量的一种特定形式。