一种可控曲面光栅的研制.pdfVIP

第十一届全国实验力学学术会议 大连 2005 一种可控曲面光栅的研制 1 2 2 1 叶 超 ，谢永军 ，付绍军 ，何世平 (1. 中国科学技术大学力学和机械工程系，安徽 合肥 230027; 2. 中国科学技术大学国家同步辐射实验室，安徽 合肥 230029) 摘要：曲面变间距光栅同时具有透镜和平面光栅两种光学元件的功能，可用曲面变间距光 栅一种光学元件取代透镜和平面光栅两种光学元件，不仅简化了加工过程、提高了制作效 率、降低了制作成本，而且大大简化了光学系统，提高了系统的稳定性。传统的离子刻蚀 方法不容易在曲面上制作光栅，且制作效率很低，因而曲面光栅的研制很少有人研究。本 文提出一种曲面变间距光栅的制作方法，首先在平面基片上制作光栅，再利用一种特殊材 料(PDMS)将光栅转移到曲面上，避开了直接在曲面上进行光栅制作的步骤，且所制光栅性 能稳定，光栅质量好。文中对所研制的曲面光栅进行了实验验证，并利用环境扫描电镜检 测了光栅的线密度分布。 关键词：变间距光栅，聚二甲基硅氧烷(PDMS), 混合溶胶-凝胶 The fabrication of a Controllable Curved Surface Grating 1 2 2 1 Ye Chao ，Xie Yong-jun ，Fu Shao-jun ，He Shi-ping (1. Department of Morden Mechanics, University of Science and Technology of China, Hefei, 230027；2.NSRL, University of Science and Technology of China, Hefei, 230027) Abstract: The curved surface Varied-line-space grating can replace lens and plane grating because it possess the function of them, which simplifies the facture process, improves the facture efficiency, reduces the cost and simplifies the optics system, improves the stability of the system. There are few people focus on the curved surface grating because ion etching step that is difficult on curved surface directly and low efficiency. A new facture method was introduced in the article, first, the grating is facture on plane base, second, the grating is transferred on curved surface by a especial material (PDMS). The facture in curved surface directly is avoid in the facture process, so the curved surface grating is high quality. In this study, the factured curved surface grating was tested by experiment, and the grating line density distribution was detected by SEM. Key words: Varied-line-space grating; polydimethylsiloxane(PDMS); hybrid sol-gel 1