A computational stochastic multiscale methodology for MEMS structures involving adhesive contact.pdfVIP

Tribology International xx (xxxx) xxxx–xxxx Contents lists available at ScienceDirect Tribology International journal homepage: /locate/triboint A computational stochastic multiscale methodology for MEMS structures involving adhesive contact T.-V. Hoanga,1, L. Wua, S. Paquayb, J.-C. Golinvala, M. Arnsta, L. Noelsa,? a University of Liège - Department of Aerospace and Mechanical Engineering, Allée de la Découverte 9, Quartier Polytech 1, B-4000 Liège, Belgium b Open Engineering SA, Rue Bois Saint-Jean 15/1, B-4102 Seraing, Belgium ARTICLE INFO Keywords: Adhesive contact Random surface Multiscale contact Uncertainty quanti?cation ABSTRACT This work aims at developing a computational stochastic multiscale methodology to quantify the uncertainties of the adhesive contact problems due to capillary e?ects and van der Waals forces in MEMS. Because the magnitudes of the adhesive forces strongly depend on the surface interaction distances, which in turn evolve with the roughness of the contacting surfaces, the involved structural behaviors su?er from a scatter. To numerically predict the probabilistic behaviors of structures involving adhesion, the proposed method introduces stochastic meso-scale random apparent contact forces which can be integrated into a stochastic ?nite element model. Because the evaluation of their realizations is expensive, a generator for the random apparent contact force using the polynomial chaos expansion is constructed in an e?cient way. 1. Introduction One of the common failures in microelectromechanical systems (MEMS) is stiction [1–8], in which two micro surfaces permanently adhere together, e.g. the stiction failure of micro cantilever beams illustrated in Fig. 1(a). The failure is due to the dominance of the adhesive surface forces, such as van der Waals (vdW) forces and capillary forces, in comparison with the body forces. On the one hand, in humid conditions condensing menisci develop between the contacting hydrophilic surfaces, result into