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Track-Following Control with Active Vibration Damping of a PZT-Actuated Suspension Dual-Stage Servo System 1  ?  Yunfeng Li?, Federico Marcassa?, Roberto Horowitz?, Roberto Oboe?, and Robert Evans§ Dept. of Mechanical Engineering, University of California at Berkeley, CA 94720-1740, USA ? §  Abstract This paper discusses the controller design of a PZT- actuated suspension dual-stage servo system in hard disk drives. The proposed control structure includes an active vibration damping control loop and a track- following control loop. The vibration damping con- trol loop, which runs at a faster rate than the track- following control loop, utilizes a PZT element on a PZT-actuated suspension as a vibration sensor to damp the resonance modes of the voice coil motor (VCM) and the PZT actuator. The vibration-damping controller is designed using Kalman ?lter based state feedback control techniques. A simple dual-stage track-following controller is designed, based on the damped actuator model, using the sensitivity function decoupling de- sign method. Simulation and experimental results are presented to demonstrate the bene?ts of this control scheme in expanding servo control bandwidth and sup- pressing air?ow excited structural vibrations. 1 Introduction The use of a PZT-actuated suspensions as a second stage actuator has been proposed as one approach to dual-stage actuation in hard disk drives [1]. Compared to the actuated slider/head approach, the main disad- vantage of this approach is that the PZT actuator is located between the E-block arm and the suspension, and can excite their vibration modes. Normally notch ?lters are utilized in disk drive servo control designs to ensure the stability of the control system. However, notch ?lters reduce phase margin and detrimentally af- fect the controller robustness [2], [3]. Furthermore, the arm and suspension vibration modes can be excited by the air?ow generated from disk rotation, which causes undesirable head o?-track mo-