共面波导CPW和平面微带线CPS--测试方案.pdf

? Protemics GmbH protemics Coplanar stripline (CPS) emitter and transceiver microprobes for ultra-high bandwidth on-chip Terahertz measurements IRMMW 2015, HongKong ? Protemics GmbH protemics On-chip sensing o Microfluidics o Spectroscopy o Biomolecule Detection Motivation Planar waveguides – fields of application Planar THz Waveguides CPW, CPS, MSL … Signal transmission o Chip-to-Chip o On-Chip o TDR Research o Waveguide development o Nonlinear effects o Intense fields Passive devices o Resonators o Antenna o Filter ? Protemics GmbH protemics State-of-the-art Planar waveguide measurements Microprobes based on DC-contact ?Handling ? Coupling ? Throughput ? S-Parameter ? Bandwidth ? Risetime ?Damage ?DC contact THz TD free-space coupling via Antenna i.e. Horn Antenna Embedded Emitter - (embedded) Detector PC-Emitter PC-Detector ? Bandwidth ? S-Parameter ?Handling ? Coupling ? Throughput ? Artifacts ? Bandwidth ? Coupling ? (Spatially resolved) ? Cost ? Throughput ? Versatility Versatile, high-bandwidth, non-destructive external device for signal injection needed ? Protemics GmbH protemics Outline o Motivation o Application case: Coplanar Stripline (CPS) o CPS Emitter Design o Experimental investigation of CPS Emitter o CPS Transceiver Design o Experimental investigation of CPS Transceiver o Conclusion ? Protemics GmbH protemics Application case: Coplanar Stripline 150μm Dielectric (PET) w = 50μm s = 30μm Au or Al (50-500nm) CPS (Top view) CPS (Cross section) CPS field distribution (odd mode) Au Dielectric ? Protemics GmbH protemics CPS-Emitter Emitter Design Desired features and properties o Stand-alone emitter o Good, non-destructive coupling to DUT o Comfortable handling o High bandwidth and amplitude o CPS odd mode excitation o Pure single cycle pulse Device under test ? Protemics GmbH protemics CPS-Emitter Emitter Design Desired features and properties o Stand-alone emitter o Good, non-destructive coupling to DUT o Comfortable handling o High bandwid