基于Fuzzy-PID的PZT微纳扫描控制算法.pdfVIP

第 30 巷第 5 期 2ω9 年 5 月 仪器仪表学报 Chinese Joumal of Scientific Instrument Vol. 30 No.5 May 2∞9 基于 Fuzzy-PID 的 PZT 微纳扫描控制算法* 卸文栋，魏永强，纪海煎 (南同航空大学无损梭削技术教育部f重点实验室 商品 33∞63) 摘 襄:针对压电陶瓷的特性，提/11了基于 Fuzzy平ID 的复合控制算浩。该算法在楼个过程巾的不同阶段采用不间的控制方 式，即根据误差信号 e 的大小有选样性的使用模糊棺制成 PID 控制，因此不需要建立被控对象的精确数学模细，而且还继承 r 常规 PIυ 控制静差小、静恋稳定性好的特点，[叫时又兼有模糊控制适应能力强、动态性能好的优势。实验巾采用此算法在得闭 ~控制电JI最大误差为 18 mV ，贵位重复精度为 6 nm，系统相对误差队 15% ;在fv:移量为 10μm 的时间位移阶跃响应向钱中阶 越响应时间的为 20 阳，11.在电压为 80 V 的蠕动曲线中，3 min 内的蠕变为 3.6% ,3 min 以后变化开始缓慢η 由此可知 i失控制方 法能够有效地降低用电陶瓷非线仰所11起的位移误，ti，提商店位精眩，而且应能改普J-k电陶髓的蠕动特性。 关键诩:压电陶资; Fuzzy-PID 胶制 ;pm 抑制;模糊榨制;蜗动特性 中回分提号: TN29 文献标识码:A 国家标准的学科分类代码: 140.45 Fuzzy醺PID control algorithm for PZT micro/nano scanner Zou Wendong ，鄂、i Yon阴阳吨， Ji Haiyan (Key ωbor，ωory 01 Nondestr削 Abstract: This paper pre自ented a compositing control method based on Fuzzy-PID for micro/nano displacement scan- ner in accordance with the property of PZT. By applying the different control mode to the various phases in the whole process , i. e. altematively choosing fuzzy control or PID control according to lhe amount of error signal without es唰 tahlishing exact mathematical model for the controlled object. The algorithm not only ínherited the quality of low stat- ic error and excellent novel stability as routine PID , but also had the advantage of adaptahility and dynamic charac- teristics as fuzzy control. The experiment using this control algoríthm obtained maximum closed-loop voltage error of 18 mV , position repeatability accuracy of 6 nm , system relative error of 0.15%. With the displacement of 10μm ， the step-response time was about 20 ms in the displacement-time curve. In the Wiggle curve of the drop margin with driving voltage of 80 V, creep within 3 minutes was 3. 6% , and thereafter the change became slower. It was known that this approach could effectively reduce the displacement error caused by the nonlinearity of the piezoelectric ce- ramic and increase the positioning accuracy , as well as improve the