ClosedIonSourceGasAnalyzers.PDFVIP

Closed Ion Source Gas Analyzers CIS100/200/300 — 100, 200 and 300 amu systems CIS Series Closed Ion Source Gas Analyzers With better than 1 ppm detection limit, direct sampling at mTorr · 100, 200 and 300 amu systems pressure, and a user-friendly Windows software package, the CIS systems will satisfy your most demanding applications. · 1 ppm detection