激光加工技术在晶硅电池制造中的应用新方案.pptVIP

激光加工技术在晶硅太阳电池制造中的应用; 激光在晶体硅太阳能行业应用简介 激光掺杂技术（Laser Doping) 激光钻孔技术(Laser drilling) 激光刻边技术(Laser Edge Isolation); 激光在晶硅太阳能行业应用;应用背景：选择发射极太阳电池(Selective Emitter SE);实现选择发射极（SE)的五种方法; 激光作用在掺杂源(钝化层)和硅片表面，利用激光熔化原理，预涂层的掺杂原子扩散到硅基材表面，当激光移开后，硅基材冷却并结晶，与掺杂原子形成合金，称为LIMPID法( laser-induced melting of pre-deposited impurity );激光掺杂的优点;激光掺杂技术方案; 激光器要求及选型 前道工艺对激光掺杂效果的影响 激光工艺参数对电池指标影响 掺杂源制作工艺对电池性能影响 后道工艺(电镀)对电池指标的影响 ;产业化难点;参考资料;激光钻孔技术;四种不同类型激光钻孔效果;激光钻孔工艺开发;激光波长 355nm 单脉冲能量100uJ;半导体晶圆TVS激光钻孔分析;激光钻孔现状与发展趋势;[1] Nils Peter Harder Laser processed high-efficiency silicon RISE-EWT solar cells and characterisation 2009 01 Solid state physics [2] ROFIN Presentation 2008 09 [3] High throughput laser percussion Interconnect Microvia Process Xsil Company EMC 3D 2007 [4] High peak power solid state laser for micromachining of hard materials SPIE 2003 [5] Devices and drilling and removing material using a laser beam US patent 20090045176 [6]N.brinkmann et al Epitaxy-through-hole processes for epitaxy wrap-through solar cells 24th EUPVSEC 2009 [7]A.A Mewe et al MWT plug Metallization Improved performance and process stability of PUM and ASPIRE Cells 23rd EUPVSEC 2008 ;三种产业化PN结去边方法比较:;;激光刻边成本分析;激光刻边成本分析(业界观点):;[1] Finlay Colville Laser scribing tools edge in front， Global solar technology 2009 3-4 P.12 [2] Ing. Ludger et al Analysis of different laser concepts for edge isolation of crystalline solar cells Proceedings 23rd EU PVSEC Valencia [3] E. Schneiderlochner et al Review on different technologies for industrial solar cell edge isolation Proceedings 21st. European PVSEC， Dresden， 2006 [4] Ronald et al Excimer laser junction Isolation of crystalline silicon solar cells Transactions on electron devices IEEE pp353-354 February 1990 [5] E. Schneiderlochner et al Scanning Nd：YAG laser system for industrially applicable processing in silicon solar cell manufacturing Photovoltaic Energy Conversion, 2003 [6] M.D Abbott Laser isolation of shunted regions in industrial solar cells 2007 [7] A