测量探针作用力几种提取方法比较.docVIP

测量探针作用力的几种提取方法比较 摘要：作为直接测量微小表面结构的探针，原子力型探针已经广泛的应用于检测的各个领域。探针与表面的相互作用力可以通过振动参数的测量进行求解。本文介绍了两种求解方法，计算了其中一种方法在给定作用力下的求解误差,分析了计算时的影响误差因素。 关键词：探针；作用力；振动 Comparison of Methods for Extracting Interaction Forces of Measuring Probe Abstract: Atomic force probe has been widely used in various fields as a direct measurement of surface of tiny structure. Interaction forces on the surface of the probe can be solved by measuring parameters of the vibration. This article introduces two methods of solving the Interaction forces. The error was calculated in a given interaction force with one of the methods, and factors was analyzed during the calculation. Key Word: Probe; Interaction Force; Vibration 1 介绍 随着测量结构的越来越小型化以及表面形貌越来越精密，不仅要求要求接触测量而且测量力也要求越来越小。当接触面积一定的情况下，然而探针与表面相互作用力在很大程度上衡量测量是否破坏表面的参数。同时，作用力的不同也能为我们提供表面属性的变化 ADDIN EN.CITE EndNoteCiteAuthorBanerjee/AuthorYear2004/YearRecNum54/RecNumDisplayText[1]/DisplayTextrecordrec-number54/rec-numberforeign-keyskey app=EN db-id=f0vf9xfao5pdw2ed9wbpx5tbsfxeprtxat0a54/key/foreign-keysref-type name=Journal Article17/ref-typecontributorsauthorsauthorBanerjee, S/authorauthorGayathri, N/authorauthorShannigrahi, SR/authorauthorDash, S/authorauthorTyagi, AK/authorauthorRaj, B/author/authors/contributorstitlestitleMapping of surface local elastic constant using Atomic Force Acoustic Microscopy/titlesecondary-titlearXiv preprint cond-mat/0409014/secondary-title/titlesperiodicalfull-titlearXiv preprint cond-mat/0409014/full-title/periodicaldatesyear2004/year/datesurls/urls/record/Cite/EndNote[ HYPERLINK \l _ENREF_1 \o Banerjee, 2004 #54 1]。 原子力型探针为我们提供了一种纳米级测量的手段。其动态测量模式可以有三个参数可以进行测量：幅值、相位和频率。由于探针和测量表面不是线性作用，所以动态模式测量下的参数变化也是非线性的 ADDIN EN.CITE EndNoteCiteAuthorGiessibl/AuthorYear1997/YearRecNum86/RecNumDisplayText[2]/DisplayTextrecordrec-number86/rec-numberforeign-keyskey app=EN db-id=f0vf9xfao5pdw2ed9wbpx5tbsfxeprtxat0a86/key/foreign-keysref-type name=Journal Article17/ref-typecontributorsauthorsauthorGiessibl, Franz J/author/authors/contr