Microstructureandmechanicalpropertiesofchromiumoxide.pdfVIP

Microstructure and mechanical properties of chromium oxide coatings Xiaolu Pang Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China; and Department of Mechanical Engineering, University of South Florida, Tampa, Florida 33620 Kewei Gaoa) Department of Materials Physics and Chemistry, University of Science and Technology Beijing, Beijing 100083, China Alex A. Volinsky Department of Mechanical Engineering, University of South Florida, Tampa, Florida 33620 (Received 2 August 2007; accepted 12 September 2007) Chromium oxide coatings were deposited on low-carbon steel by radiofrequency reactive magnetron sputtering at different oxygen flux values. X-ray diffraction, x-ray photoelectron spectroscopy, and high-resolution transmission electron microscopy were used to investigate the microstructure of chromium oxide coatings. Varying oxygen flux changed the coating microstructure; as with increasing oxygen flux the chromium oxide coating undergoes amorphous-to-crystalline transformation. The coating developed strong (300) texture at higher oxygen flux. Hardness, elastic modulus, wear resistance, and adhesion were investigated by nanoindentation and pin-on-disk tests. With changes in the coating microstructure as a function of increased oxygen flux, hardness, elastic modulus, and wear resistance were improved, but its adhesion was weakened. I. INTRODUCTION deposition parameters,7–9 which in reactive sputter depo- Chromium oxide is the hardest oxide that also exhibits sition play an important role to achieve a strictly stoichio-