CROSS-VALIDATION OF COMPETITIVE ASSOCIATIVE NETS FOR STABLE TEMPERATURE CONTROL OF RCA CLEA.pdfVIP

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CROSS-VALIDATION OF COMPETITIVE ASSOCIATIVE NETS FOR STABLE TEMPERATURE CONTROL OF RCA CLEA.pdf

CROSS-VALIDATION OF COMPETITIVE ASSOCIATIVE NETS FOR STABLE TEMPERATURE CONTROL OF RCA CLEA

CROSS-VALIDATION OF COMPETITIVE ASSOCIATIVE NETS FOR STABLE TEMPERATURE CONTROL OF RCA CLEANING SOLUTIONS H. Tomisaki, S. Kurogi, N. Araki, T. Nishida, Y.Fuchikawa M. Mimata, K. Itoh Department of Control Engineering, Kyushu Institute of Technology, Komatsu Electonics Inc., Kitakyushu, Fukuoka 804-8550, Japan Hiratuka, Kanagawa 254-8543, Japan Abstract— For cleaning silicon wafer

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