声表面波滤波器理论研究进展.PDFVIP

第 14 卷 第 3 期 太赫兹科学与电子信息学报 Vo1．14，No．3 2016 年 6 月 Journal of Terahertz Science and Electronic Information Technology Jun．，2016 文章编号：2095-4980(2016)03-0467-07 声表面波滤波器理论研究进展 陈颖慧，张 慧，郑英彬 ( 中国工程物理研究院 电子工程研究所，四川 绵阳 621999) 摘 要 ：为使声表面波(SAW) 滤波器技术向更高的频段发展，对SAW 滤波器的基础理论进行了 分析：展示了压电材料压电效应(逆压电效应)的产生机理，并通过例子对比说明压电材料的晶体结 构属性。介绍了重要的物理量机电耦合系数以及SAW传播的物理机理；重点推导了SAW在压电介 质中的传播性质，并同非压电介质的传播特性进行了对比。得出SAW在压电介质中是非色散波， 存在3个方向的质点位移分量；压电薄膜中SAW是色散波，且压电薄膜使得声表面波速度发生变化。 关键词 ：声表面波；Rayleigh 波；压电效应；压电薄膜 中图分类号 ：TN713 文献标识码 ：A doi ：10.11805/TKYDA201603.0467 Research progress on the theory of Surface Acoustic Wave filters CHEN Yinghui，ZHANG Hui，ZHENG Yingbin (Institute of Electronic Engineering，China Academy of Engineering Physics，Mianyang Sichuan 621999，China) Abstract： In order to extend the frequency of Surface Acoustic Wave(SAW) filters to a higher band, the principles of SAW filters are analyzed. At first, piezoelectricity and ob-piezoelectricity of piezoelectric film are presented. Then the performances of crystal structure of piezoelectric material are compared among different examples. The electro-mechanical coupling coefficients of important physical quantities are introduced as well as the physical mechanism of SAW transmission. Then the transmission properties of SAW in the piezoelectric material and piezoelectric film are studied in detail. And the transmission properties of SAW in piezoelectric medium and in ob -piezoelectric medium are contrasted. The results indicate that S