氧化铬薄膜的界面高分辨研究_庞晓露.pdfVIP

真 　空 　科 　学 　与 　技 　术 　学 　报 第 28 卷 　第 5 期 　　　　　　　　　　　　 　　　　　　 420 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 2008 年 9 、10 月 　 氧化铬薄膜的界面高分辨研究 庞晓露 　高克玮 　杨会生 　王燕斌 (北京科技大学材料物理与化学系 　北京 　100083) Interfacial Microstructures of Chromium Oxide Coatings Pang Xiaolu , Gao Kewei ,Yang Huisheng ,Wang Yanbin ( Dep artment of M aterials Physics and Chemistry , B eij ing University of Science and Technology , B eij ing 100083 , China) 　　Abstract 　The multilayered chromium oxide coatings ,Cr/ Cr O ,were deposited on low carbon steel substrates by RF 2 3 reactive magnetron sputtering. The microstructures and mechanical properties at the interfaces of the multilayer and the substrate were characterized with scanning electron microscopy , ( SEM) , high resolution transmission electron microscopy ( HRTEM) ,and atomic force microscopy (AFM) . The results show that the intermediate phases of Fe and Cr exist at the interface of Cr tranition layers and the substrate ; and that amorphous chromium and its oxide layer ,about 100 nm in thickness ,reside at both the interface of the Cr and steel ,and the interface of the Cr transition layer and Cr oxides. We suggest that the amorphous Cr and amorphous Cr oxides result in smooth and compact surfaces ,with finer grains and lower residual stress ,of the coatings. 　　Key words 　Cr/ Cr O film ,Interface microstructure ,Amorphous layers ,HRTEM ,AFM 2 3 摘要 　氧化铬薄膜具有高的硬度 ,很好的耐磨 、耐蚀