Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer 英文参考文献.docVIP

Sensors 2009, 9, 4104-4118; doi:10.3390/OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer Dongling Li 1,2,3,*, Zhiyu Wen 1,2,3, Zhongquan Wen 1,2,3, Xuefeng He 1,2,3, Yinchuan Yang 1,2,3 and Zhengguo Shang 1,2,3 1 Key National Lab of Novel Micro/Nano Devices and System Technology, Chongqing 400030, China 2 National Center for International Research of Micro/Nano System and New Materials Technologies, Chongqing 400030, China 3 Microsystem Research Center, and