The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis 英文参考文献.docVIP

Sensors 2003, 3, 285-289 sensors ISSN 1424-8220 ? 2003 by MDPI /sensors The NO2 sensing ITO thin films prepared by ultrasonic spray pyrolysis Zheng Jiao*, Minghong Wu, Zheng Qin, Minghua Lu, Jianzhong Gu Shanghai Applied Radiation Institute, Shanghai University, Shanghai 201800, P.R.China *Author to whom correspondence should be addressed. E-mail: jiaozheng@ Received: 20 May 2003 / Accepted: 10 June 2003 / Published: 22 August 2003 Abstract: In this paper ITO thin films were deposited on alumina substrates by ultrasonic spray pyrolysis. The NO2 sensing properties of IT