CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials.docVIP

Sensors 2008, 8, 2662-2672 sensors ISSN 1424-8220 ? 2008 by MDPI /sensors Full Research Paper CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials Sung Pil Lee 1,*, Ji Gong Lee 2 and Shaestagir Chowdhury 3 1 Department of Electronic Engineering, Kyungnam University, Masan, Kyungnam 631-701, Korea 2 Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, Ohio 44106, USA 3 Intel Corporation, Hillsboro, OR 97124, USA * Author to whom correspondence should be addressed; E-mail: sensors@kyungnam.ac.kr; Tel: 82-55-249-2642, Fax