粉末涂敷法制备CuInSe2薄膜的硒化烧结过程研究.pdfVIP

学兔兔 第27卷第2期 粉末冶金技术 VolJ 27．No．2 2009年4月 Powder Metallurgy Technology Apr．2009 粉末涂敷法制备CuInSe2薄膜的硒化烧结过程研究 聂洪波 王延来 王义民 果世驹一 (北京科技大学材料科学与工程学院，北京 100083) 摘 要： 用粉末涂敷法在Mo箔上涂敷CulnSe：前驱体薄膜，进而在H：气氛中热处理制备了太阳能薄膜电 池吸收层用CuInSe 薄膜。利用x射线衍射仪(XRD)、扫描电镜(SEM)和其配备的能谱仪(EDS)对CuInSe 薄膜进行分析和表征，对硒化烧结过程中化学反应的可能性进行了热力学计算。结果表明：硒化烧结过程分 为三个阶段：二元化合物CuSe和三元化合物CuInSe 的形成均出现在硒化烧结的前两个阶段；第三个阶段主 要是CuInSe 晶粒长大和薄膜的致密化过程。H：气氛在CuInSe 薄膜烧结过程中可能起到催化剂的作用。 关键词：CulnSe2；Cu—In合金；烧结；热力学 Sintering process in preparation of CulnSe2 thin films by powder coating Nie Hongbo，Wang Yanlai，Wang Yimin，Guo Shiju (School of Materials Science and Engineering in University of Science and Technology Beijing，Beijing 100083，China) Abstract：CulnSe2 precursor layers were coated by powder coating and followed by annealing in a H2 atmosphere and CuInSe2 thin films for solar cell were successfully prepared．Precursor layers and selenized films were characterized by X—ray diffractometry(XRD)，scanning electron microscopy(SEM)and energy dispersive spectroscopy(EDS)，and thermodynamics of chemical reactions in sintering process also have been calculated．The resuhs indicate that the sintering process consists of three stages．The binary compound CuSe and ternary compound CuInSe2 forms in the first and second stages respectively．The growth of CuInSe2 grains occurs during the third stage． H2