扫描电镜课件..pptVIP

Chapter 9 Transmission electron microscopy and scanning electron microscopy 9.1 Introduction TEM provides detailed structural information at levels down to atomic dimensions. It is possible to obtain information within the range 1-100 nm. advantage of TEM 1. Very high resolution 2. Can be rapidly adjusted to provide an electron diffraction pattern from a selected area disadvantage of TEM 1. Only for thin samples, less than 1 ?m thick, preferably less than 100 nm 2. Only directly detect the solid samples 9.2 Principle 透射电镜三要素： 1. 分辨率 Airy盘的直径通常以第一级暗环的半径r表示，由物理学可以得到：r=0.61?/nsin?