氮化铝陶瓷的微波烧结研究.pdf

第 17 卷第 11 期 中国有色金属学报 2007 年 11 月 Vol.17 No.11 The Chinese Journal of Nonferrous Metals Nov. 2007 文章编号：1004-0609(2007)11-1729-10 AlN 陶瓷基板材料的典型性能及其制备技术 王 超，彭超群，王日初，余 琨，李 超 ( 中南大学 材料科学与工程学院，长沙 410083) 摘 要：AlN 陶瓷是一种新型的基板材料，具有优异的电性能和热性能，被誉为新一代高密度封装的理想基板材 料。介绍 AlN 陶瓷的典型性能和导热机理；讨论AlN 粉末的 5 种合成方法：铝粉直接氮化法、Al O 碳热还原法、 2 3 化学气相沉积法、溶胶−凝胶法、自蔓延高温合成法和等离子化学合成法；分析 AlN 烧结助剂的选择和 5 种烧结 工艺：热压烧结、无压烧结、放电等离子烧结、微波烧结及自蔓延烧结；阐述 AlN 基板的制备工艺及其影响因素。 关键词：AlN ；导热机理；合成；烧结；烧结助剂；基板 中图分类号：TQ 174 文献标识码：A Typical properties and preparation technologies of AlN packaging material WANG Chao, PENG Chao-qun, WANG Ri-chu, YU Kun, LI Chao (School of Materials Science and Engineering, Central South University, Changsha 410083, China) Abstract ：AlN is a new packaging material with excellent electrical and thermal mechanical. The typical properties and the heat conduction mechanisms of AlN ceramics were introduced. Five synthesis methods of AlN powder were discussed, namely direct nitrogenation of Al powder, carbothermal reduction of Al O , chemical vapor deposition, sol-gel 2 3 method, self-propagating high-temperature synthesis and plasma chemical synthesis. The choice of AlN sintering additives and five sintering technologies were analysed, namely hot pressing sintering, pressureless sintering, spark plasma sintering, microwave sintering and self-propagating sintering. The preparation processes of AlN sub