真空技术基础-7-2012.pptVIP

真空的获得 真空的获得 Pump Down（抽气） Typically follows a well-defined sequence according to the types of pumps on the vacuum system For UHV systems, typically requires a few hours to reach a medium vacuum after a vent to air Bake Out Heat the chamber to temperatures between 100oC and 200oC for 1 - 2 days. Rapidly remove adsorbed gases from the chamber walls at high temperatures in order to lower the outgassing rates at room temperature. Generally it takes another day to cool and recover base pressure. 真空的测量 ? 热电偶真空计 真空的测量 Heat filament with a constant current. Measure filament temperature with thermocou