光学元件亚表面损伤检测技术分析现状.pdf

48, 081204 (2011) Laser Opt oelect ronics Progress 20 11 《》 光学元件亚表面损伤检测技术研究现状 刘　健　马占龙　王君林 ( , 130033) 　(SSD), 。 , , 。 , 。 　;;; 　T N244　　　　A　　　doi:10.3788/LOP48.081204 Research Status of Subsurface Damage Detection Technology of Optical Elements Liu Jian　Ma Zhanlong　Wang Junlin (S tate Key L aborat ory of App lied Op tics, Changchun Insti tu te of Op tics, Fin e M echanics an d P hysics, Chinese A cademy of Scien ces, Changchun , J ilin 130033, Chin a ) Abstract　Subsurface damage (SSD)produced in traditional optical fabrication will reduce service performance and lifetime of optical elements.It is necessary to detect and control the subsurface damage in the fabrication process. Destructive and nondestructive detection methods of subsurface damage are analy ed.The merits and demerits of these detection methods are also discussed.The gap of subsurface damage detection technologies at home and abroad is presented, and the trend of subsurface damage detection technology is described. Key words　optical element;subsurface damage;destructive detection;nondestructive detection OCIS codes　120.4290;160.4670;350.1820 1　　　 、, , , (SSD )。, , [ 1] 。 , 、 。。 [2, 3] , :1), 0 .1 ～1 μm, ;2), 1～100 μm, ;3), 100 ～200 μm, ;4 )。 , 。 　　:2011-03-21;:20 11-05-05;:20 11-07-21 :(2009Z X02205)。 :　(1983—), , , , 。 E-mail:emailtoliuj ian @126.co m 081204-1 48, 081204 w ww .optic j ournal.net 2 　 、 。 , , 。 , 。1 , 、 1 、。 Fig.1 Schematic of SSD (defect layer)in optical element 1。 1