超高斯相位型光瞳滤波器轴向超分辨性能_何毅.pdf

第 30 卷　第9 期 光　学　学　报 Vol.30, No.9 2010 年9 月 ACTA OPTICA SINICA September, 2010 　　文章编号:0253-2239(2010)09-2568-05 超高斯相位型光瞳滤波器轴向超分辨性能 何　毅　张 东　李国俊　王　炯　罗先刚 (中国科学院光电技术研究所微细加工光学技术国家重点实验室, 四川 成都 610209) 摘要　研究了超高斯相位型光瞳滤波器的轴向超分辨性能。通过数值模拟, 使用新的参数 T, w 讨论确定了三区 二元相位型光瞳滤波器的超分辨区域。将超高斯相位型与二元相位型滤波器对比, 分析相同参数下两种光瞳滤波 器的轴向超分辨能力, 进而讨论超高斯相位型滤波器的轴向超分辨性能随其阶数的变化关系。超高斯型滤波器与 相位型相比, 超分辨能力略有降低, 但其旁瓣能量也有所降低, 因此能量利用率有所提高。 关键词　成像系统;超分辨;光瞳;滤波器;超高斯 中图分类号　O539　　　文献标识码　A 　　　doi:10.3788/AO2568 Axial Super-R esolution Effects of Super-Gaussian Phase Filters He Yi　Zhang Yudong　Li Guojun 　Wang Jiong　LuoXiangang (S tate Key Laboratory of Opt ical Techn ologies f or Microf abrication , Institut e of Op tics and Electron ics, Chin ese A cademy of Sciences, Chengdu , Sichu an 610209, China ) Abstract　A ial super-resolution effects of super-Gaussian phase filters are studied in detail.New parameters (T, W )are used to determine the super-resolution region of three zones annular binary phase filter through numerical simulations.A ial super-resolution effect difference between super-Gaussian phase filter and annular binary phase filter is discussed on condition of the same parameters.The a ial super-resolution response of super-Gaussian phase filters with it′s inde is also studied.Compared to annular binary phase filters, the super-resolution of super-Gaussian phase filters has a slight decline.Whereas it′s side-lobes also has a little decrease, energy utilization rate increases. Key words　imaging system;super-resolution;pupil;filter;super-Gaussian 1　引　　言 超分辨光瞳滤波器主要分为振幅型、相位型和 1952 年,T oraldo 将超分辨天线的概念引入光 复振幅型等几种类型。在早期的研究中, 主要以振