飞秒激光金属材料微孔加工.pdfVIP

飞秒激光金属材料微孔加工 摘要 随着科学技术与生产的发展, 出现了越来越多带有微小孔的零件。由于产品性能的提高, 对孔的精度等方面的要求越来越高；所采用的材料也多种多样, 其中包括硬质合金、金刚石等难切削材料。因此, 人们在完善传统的微小孔加工技术的同时,又相继探索出一些新的微孔加工方法 。 本文主要介绍了在微孔加工中传统加工方法的缺陷，综述了飞秒激光金属 材料微孔加工的背景、加工方法和特点。 飞秒激光具有超快、高能量密度、非线性的特点，在微加工领域具有独特的 优势，特别是利用飞秒激光加工高质量和高深径比微孔。不同于电火花加工、电 化学加工、聚焦离子束加工等传统的微孔加工方法，飞秒激光微孔加工具有不接 触、加工热影响区小、加工精度高、加工质量高、应用范围广等特点，被用来加工 光波导、表面微纳结构、微流体装置、微传感器等，在生物、医学、汽 、航天、航 空等领域得到了广泛的应用。 关键字：飞秒激光，微孔加工，电火花加工 Abstract With the development of science and technology and production, there are more and more parts with micro holes. Due to the improvement of the performance of the product, the precision of the hole is more and more high, the materials used are various, including hard alloy, diamond and other hard cutting materials. Therefore, people in improving the traditional micro hole processing technology at the same time, but also to explore a number of new micro processing methods In this dissertation, defects of traditional processing methods in micro hole machining are discussed. femtosecond laser process micro-holes in Metals are studied. The back-ground , features, machining methods and applications of femtosecond are overviewed. Femtosecond laser is characterized as ultrafast pulse, non-linear and ultra-high energy densities , and it has extraordinary advantages in micromachining, especially for high quality and high aspect-ratio micro-holes. Compared to the traditional micro-holes machining technology, such as Electric Discharge Machining, Electric Chemistry Machining and Focused Ion Beam Machining, femtosecond laser drilling of micro-holes is distinguished as non-contact, small heat-affected zone, high accuracy and high quality. And it has been widely applied in biology, medical, aviation and aerospace, etc. We take advantage of femtosecond laser micromachining technology to manufacture optical waveguid