unit10表面工程.pptVIP

Diamond CVD coating process is introduced to increase the surface hardness of cutting tools. However, the process is done at the temperatures higher than 700℃ (1300℉) which will soften most tool steel. 为增加切削刀具表面硬度引入了钻石化学蒸发沉淀涂层工艺。可是此工艺要在高于700℃(1300℉)的温度下才能实现，这温度会软化大多数工具钢。 Thus, the application of diamond CVD is limited to materials which will not soften at this temperature such as cemented carbides. 因而钻石化学蒸发沉淀的应用受到材料限制，要求材料在此温度下不软化例如硬质合金。 Plasma-Assisted CVD coating process can be performed at lower temperature than diamond CVD coatings. This CVD process is used to apply diamond coatings or silicon carbide barrier coatings on plastic films and semiconductors, including the state of the art 0.25μm semiconductors. 等离子体辅助化学蒸发沉淀涂层工艺可以在比钻石化学蒸发沉淀涂层低的温度下操作。这种化学蒸发沉淀用于在塑料膜和半导体(包括人工0.25μm半导体的情况)上覆盖钻石涂层或碳化硅隔离涂层。 Altering the Surfaces改变表面 The treatments that alter the surfaces include hardening treatments, high-energy processes and special treatments. 改变表面的处理包括淬火处理、高能加工和特殊处理。 High-energy processes are relatively new surface treatment methods. They can alter the properties of surfaces without changing the dimension of the surface. Common high-energy processes, including electron beam treatment, ion implantation, and laser beam treatment, are briefly discussed as follows: 高能加工是相对较新的表面处理方法。它们能在不改变表面尺寸的情况下改变表面性能。通用的高能加工包括电子束处理、离子注入和激光束处理简要讨论如下： Electron beam treatment. Electron beam treatment alters the surface properties by rapid heating—using electron beam and rapid cooling—in the order of 106℃/sec in a very shallow region, 100μm, near the surface. This technique can also be used in hardfacing to produce “surface alloys”. 电子束处理：电子束处理在靠近表面很浅(100μm)的区域通过用电子束快速加热并以106℃/秒等级快速冷却来改变表面性能。这种技术也被用于表面硬化产生“表面合金”。 Ion implantation. Ion implantation uses electron beam or plasma to impinge gas atoms to ions with sufficient energy, and embed these ions into atomic lattice of the substrate, accelerated by magnetic coils in a vacuum chamber. The mismatch between ion implant and the surface of