基于痕量元素分析的先进材料基因快速筛选方法研究剖析.docVIP

太阳能级多晶硅材料中痕量元素的基因快速筛选方法研究 摘 关键词：太阳能级多晶硅；；； Rapid screening method for trace elements in solar grade polysilicon materials Abstract: In this paper, we regard trace impurities in solar grade polysilicon as the detection object, starting from the preparation of polysilicon, make summary of common impurity element types in the solar grade polysilicon and polysilicon industry standard developed by domestic and foreign enterprises and organizations, then summarized the detection methods and analysis methods of impurity element in the solar-grade polysilicon.In this paper,we use glow discharge mass s