微小光学与异形孔径微透镜阵列_刘德森.pdfVIP

Laser Optoelectronics Progress C 47, 083501(2010) ★2010《》 doi:10.3788/LOP47.083501 微小光学与异形孔径微透镜阵列研究 刘德森　蒋小平 (, 400715) 　()。 , , , , 。 , 。 　;;; 　TN911.72　　　　OCIS　350.3950 220.4000 230.3990　　　　　A Study on Microoptics and Special-Shaped Aperture Microlens Arrays Liu Desen 　Jiang Xiaoping (School of P hysical Scien ce and Techn ology, Sou thwest Un iversi ty, Chongqing 400715, Chin a ) Abstract 　The progr ess in mi cr ooptics and the fabri cati on of special-shaped aperture mi crol ens array ar e r evi ewed. M icroopti cs is pr oduced on the fabri cati on of gradient-index l ens.The rapid pr ogr ess of micr ooptics is urg ed by the appli cati on of micr olens array.A new domain of mi crooptics is founded by the fabri cation of special-shaped aperture micr ol ens array.The theoreti cal and experimental resear ches on special-shaped gradi ent-index lens and special-shaped aperture mi crol ens array are mainly discussed and useful r esults ar e pr esented. Key words　microopti cs;microlens array;special-shaped aperture;photoetching i on-exchang e technique 1　　　 (、、、、———、 、)、、、、、 , , 、、、 [ 1～4] 。 。 [5] , 1969 , , “”。2 mm , 0.1mm , 。, [2, 3] (), “”, “” 。 , 、、、 , 。 , , , , 、、、。 (), , , 、。, , 　　:2009-06-30;:2009-07-17 :。 :(1937—), , , 、。 E-mail:liuds37@126.com 083501-1 47, 083501 , 98%。, , , , 。, [6] ,