多孔型铝阳极氧化膜（AAO）地形貌及相结构分析.PDF

28 5 ( ) Vol.28 No15 200310 JournalofKunmingUniversity ofScienceand Technology (Science andTechnology) Oct. 2003 (AAO) 马全宝, 张正富, 陈庆华, 徐明丽, 杨勇彪, 杨显万 ( , 650093) : , (AAO);TE ,, 75nm;,, , 50Lm.X , 600e ,900e C- Al O , 2 3 . : ;; + :TG146.1 2 :A :1007- 855X(2003)05- 0052- 04 Analysis on the Shape and Structure of Porous Aluminum Anodic Oxide(AAO) Film MA Qua n2ba o , ZHANG Zh eng2fu , CHEN Qing2hua , XU Ming2li, YANG Yong2biao , YANG Xia n2wan (Faculty of aterialsand etallurgicalEngineering, KunmingUniversity ofScience and Technology, Kunming 650093, China) Abstract: In the sameprocess conditions, porousAnodicAluminum Oxide(AAO) films have been prepared in phosphoric acid, mixture ofphosphoric acid and oxalic acid separately. TE observation of the aluminum film indicates that poresarrange in a quasi- periodicway. Inthe film, thenanopore is about 75nm. For the sample anodized in mixed acids, the film is relatively thick. Under observation with SE , thethickness of the film is about 50Lm. X- rayDiffraction result indicates that the oxide film on the surface of aluminum is amorphous if annealingtemperature islower than 600e . The amorphousaluminumbeginstotransformtoC- Al O whenthey 2 3 are annealed at temperature of900e . The amorphousfilm fabricatedbythistechnologyis comparatively steady. Key wor ds: anodic aluminum; porousfilm; aluminum film 0 [1] , , [2~ 7] . ,X ,. . WYK- 6010(); PhilipsC 430 :2003- 01- 17; :(;(: 2001E0007Q);20