【2017年整理】精密与超精密加工技术.ppt

1 机械制造技术 精密与 超精密加工 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 2 第一节 概述 精密加工----加工公差为10.0～0.1μm，表面粗糙度Ra0.30～0.03μm的加工精密加工 ◆微细加工 —— 微小尺寸的精密加工 超微细加工 ——微小尺寸的超精密加工 在高精度加工范围内，根据加工精度水平的不同，可进一步划分为精密加工、超精密加工和纳米加工三个档次。 纳米加工----加工公差小于0.01μm、表面粗糙度Ra小于0.005μm的加工称为纳米加工。 超精密加工----加工公差为0.1～0.01μm、表面粗糙度Ra0.03～0.005μm的加工超精密加工； Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 3 ◆ 几种典型精密零件的加工精度 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 4 ◆ 精密加工与超精密加工的发展 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 5 精密与超精密加工技术是一个国家制造业水平重要标志 例：美国哈勃望远镜形状精度0.01μm；超大规模集成电路最小线宽0.1μm，日本金刚石刀具刃口钝圆半径达2nm 精密加工与超精密加工技术是先进制造技术基础和关键 例：美国陀螺仪球圆度0.1μm，粗糙度Ra0.01μm，导弹命中精度控制在50m范围内；英国飞机发电机转子叶片加工误差从60μm降至12μm，发电机压缩效率从89%提高到94%；齿形误差从3-4μm减小1μm，单位重量齿轮箱扭矩可提高一倍 精密加工与超精密加工技术是新技术的生长点 精密与超精密加工技术涉及多种基础学科和多种新兴技术，其发展无疑会带动和促进这些相关科学技术的发展 精密与超精密加工地位 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 6 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 7 精密与超精密加工特点 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 8 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 9 ◆ 机理、特点 第二节 金刚石超精密加工技术 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 10 ★ 加工设备 要求高精度、高刚度、良好稳定性、抗振性及数控功能等。 ◆ 关键技术 Evaluation only. Created with Aspose.Slides for .NET 3.5 Client Profile 5.2.0.0. Copyright 2004-2011 Aspose Pty Ltd. 11 车床主轴装在横向滑台（X轴）上，刀架装在纵向滑台（Z轴）上。可解决两滑台的相互影响问题，而且纵、横两移动轴的垂直度可以通过装配调整保证，生产成本较低，已成为当前金刚石车床的主流布局。 T形布局（如图）