机电系统动力论文.docVIP

Dynamics control of High Speed High Precision Linear Motion System Abstract: This paper presents an improved robust control of a high speed high precision XY-table linear motion system used in semiconductor wire bonding machine. robust control is implemented in both inner velocity loop and outer position loop to achieve high and consistent control performance even in the presence of considerable resonance uncertainties and external disturbances. Auto-tuned feed-forward compensation based on fuzzy logic method is employed to obtain satisfactory dynamic and settling performance. High close lo