干式洗涤塔吸附剂之改性及对六氟化硫气体吸附性能之研究.doc

中文摘要 沸石吸附劑為半導體與光電產業常設之乾式洗滌塔所廣泛使用的吸 附劑材料之一。本研究乃對四種不同的商用吸附劑，如沸石、活性氧化鋁、 氫氧化鈣和錳氧化物等材料進行物性與化性分析。擇一選擇最具開發潛力 之吸附劑並加入金屬觸媒予以改質。其中沸石吸附劑同時具有高比表面積 與孔徑大小，並可經由負載活性金屬觸媒改變其組成成份。 本研究採用13X 型沸石作為製備改質吸附劑之擔體，以濕式含浸法 負載鈷、鋅、鎳、銅四種金屬觸媒對其進行改質，並進行物化特性與SF6 氣體吸附效能測試。研究結果發現，唯有含鈷及鋅金屬觸媒之吸附劑對 SF6 氣體的去除效率可達99 %以上。Co/13X zeolite 與Zn/13X zeolite 吸附 劑在含浸濃度分別為0.03 M 和0.07 M 有最佳的有效吸附容量，其吸附量 分別為1.34 mg SF6/g 與0.827 mg SF6/g。改變氣體進流量為50、100 和150 ml/min 時，去除效率分別達100 %、38 %和28 %，去除效率會隨著流量 的增加而下降，係因為流量的增加會縮短SF6 在反應管內的停留時間，使 SF6 氣體和觸媒接觸的有效反應時間減少。 英文摘要 Zeolite is one of common adsorbents for dry scrubber in semiconductor and optoelectronic industries. The physical/chemical characteristics are analyzed with four kinds of commercial adsorbents firstly, such as zeolite, actived alumina, calcium hydroxide and manganese oxide materials. An most exploitative absorbent is selected for adding metal catalyst to modify. In this study, 13X type zeolite act as an support for modification. Cobalt, zinc, nickel and copper are loaded by wet impregnation method, and the physical characteristics and adsorption capacity test are analyzed. The results show that removal efficiency of 99% can be achieved for cobalt and zinc loaded adsorbents. The maximum effective adsorption capacities of Co/13X zeolite is 1.34 mg SF6/g for 0.03M impregnation concentration and Zn/X 13X zeolite is 0.827 mg SF6/g for 0.07M impregnation concentration. The removal efficiency achieved 100%, 38%, 28% when the SF6 flow rates changed as 50, 100, 150 ml/min, respectively. The removal efficiency decreased with SF6 flow rates increased. The effective reaction time is decreased for contact between SF6 gas and catalysts with increasing of flow rate, due to flow rates shorten the retention period of SF6 in the reaction tube. 目錄 中文摘要.................................................................................................. I Abstract ...................................................................................................II 目錄......................