(基于微机电的仪器原理研究生课件）MEMS-INST5.pdf

Lecture 5-Vibration-based Transducers • Overview • Comb-drive resonators – Principles – Nonlinear effects • Damping effect Overview • Vibration system consists of a proof mass m, spring k and damper c • Used as biochemical sensors (mass changefrequency shift) • Used as inertial sensors (inertial forcetension in springK shiftfrequency shift) • Used as filter (band-pass filters) • Used as clocks (precise frequency reference) Resonators Parallel plate resonator εA C d d0 x ∂W ∂(CV 2 / 2) εAV 2 F − − e ∂d ∂d 2d 2 Force is function displacement Pull-in problem ∂ 2 − ε 2 (CV / 2) N V t F − e x , ∂x 2d W=Wn Force is independent of displacement Comb-drive resonator Comb-Drive Transducer Treat as parallel plate thickness L when gap gets smaller t d x N: number of gaps V εt ( ) ( + ) C x N L x 2 2 ∂ − ε d (CV / 2) N V t F − , ∂C N εt e x ∂x 2d ∂x d inde