阴极电弧TiN 膜层的观察检测和比较 - 中国表面工程.PDF

第 23 卷 第 1 期 中 国 表 面 工 程 Vol.23 No.1 第 1 期 陈 爽等 ：铝阳极氧化膜的硫酸钇脉冲封闭 49 2010 年 2 月 CHINA SURFACE ENGINEERING Feburary 2010 doi: 10.3969/j.issn.1007−9289.2010.01.012 阴极电弧TiN 膜层的观察检测和比较 董 骐 ，田 凯，胡中军 ，吴 臻 （北京丹普表面技术有限公司，北京 100096 ） 摘 要：通过对 TiN 膜层上和膜层中微液滴的观测 ，探讨了微液滴对膜层和基底结合力产生的影响 ，并分析了划痕试 验中微液滴破损和膜层剥落之间的关系。在丹普公司开发的 AS700DTXB 型计算机自动控制离子镀膜机上，通过调整 镀膜工艺参数、控制微液滴的尺寸 ，明显改善了 TiN 膜层和基底(高速钢和模具钢) 的结合力。采用不同的划痕仪检测 临界载荷 Lc2 可以稳定在 100 N ，或者更高；分析和探讨了膜基结合力国内外不同的检测判据和规范。根据实际测量中 的经验积累和结果分析，提出了对国内测量标准的修改意见 。 关键词：阴极电弧 ；TiN ；微液滴 ；划痕仪 ；膜基结合力 ；临界载荷 中图分类号：O484.5 文献标识码：A 文章编号：1007–9289(20 10)0 1–0063–06 Observation Test and Comparison of Cathodic–Arc TiN Film DONG Qi, TIAN Kai, HU Zhong–jun , WU Zhen (ProChina Limited COLTD, Beijing 100096) Abstract: Through observing of micro droplets on and inside TiN film, their effects on film and substrate adhesion are studied. Meanwhile, the relationship between micro droplet broken and flake peal off along scratch on the film is analyzed. With automation ion plating machine model AS700DTXB developed by ProChina Limited, through coating recipe modification to control micro droplet sizes, TiN film and substrate (high speed steel and mould steel) adhesion is to be clearly improved. Critical load (Lc2) can be stable at 100 N or higher with different scratch test instruments. In this paper different measurement criterions and norms of scratch test are studied. Based on the measurement practices and data analysisabove, a further modification on Chinese standard is proposed. Key words: cathodic arc; TiN, micro–droplet; scratch test instrument; film–subs