CT培训资料.pptx

;一、Overview Loading Box;1.LM and SLS;4;5;3.LM/SLS Motor Control unit;7;4.Tube Closure;9;5.TGA Sensor;11; 6.Lift Motor Control了er;13;14;二、Overview of Furnace;Set-up;17;Heating Cassette;19;Water Leakage Sensor;Power Distribution Cabinet I;Power Distribution Cabinet II;三.Overview Gas Cabinet ;Controls - all stacks;Controls II;26;27;Cesar柜里控制GAS PLC指示灯异常的解决方法;Central Gas Supply;Gas Panel;Gas panel POCl3;Manifold Valve Units;Valve;Sensor exhaust Gas Cabinet;四.Overview CMS ;Gas Cabinet;37;CMS Furnace Bottom;Power Distribution Cabinet