(位移传感器专业英语）Nanometrology4.ppt

Team Member Yanlong MAO Xiaomin LIU Jiahao HUO Yulin Zhao Fei WU Yongbin YANG  Qingdong SUN Atomic Force Microscopy Optical lever AFM The key information gathered in AFM comes with measuring those deflections, quantified by means of an optical lever system, coupled with position sensitive a photodiode. The probe tip is shown in contact with the sample surface: during scanning, as z-displacements cause cantilever flexions, the light from the laser is reflected onto the split photodiode. Modes Mechanical parts Quantification of surface topography is of fundamental importance for the evaluation of the generated surface; high resolution and wide measuring range being highly desirable for the evaluation of toolworkpiece interaction. Workpiece roughness also influences properties such as wear, friction, adhesion, light scattering capacitance and corrosion, even more in the microscale. Often these measurements are not possible with classical profilometers, due to the reduced dimensions or to the softness of the material to be investigated. Similarly also working tools can be finely characterized: this is very relevant, since the quality of the final worked surface is strictly connected to the condition of the working tool. Polymers and coatings Measurements and results Different scans were performed using an Atomic Force Microscope(AFM) at different sample orientations: 30° angle shifts around the fiber axis (12 measurements in total) were therefore taken into account between subsequent measurements. In parallel,measurements with the same scan parameters were carried out on a grating consisting of a two dimensional lattice of inverted cones with 2.12 μm pitch etched into a silicon chip. Representation of the AFM scan over the tip characterizer surface. a) Scan is performed over the nanostructured surface; b) differently oriented protrusions allow for characterization of different tip portions (red lines). * * Atomic Force Microscopy is the most c