(位移传感器专业英语）SPM 演示文稿.ppt

Scanning Probe Microscopy Techniqueswith Digital Instruments Multimode. SPM Group Member: Xiaomin Liu Yongbin Yang Yanlong Mao Qingdong Sun Yunlin Zhao Fei Wu Jiahao Huo Contents of the Talk 1 Introduction into Scanning Probe Microscopy (SPM) Techniques 2 Scanning Force Microscopy (SFM) 3 Characteristics of the Multimode SPM 4 Summary 5 Further Application Modules Historical General Principles of Scanning Probe Microscopy (SPM) piezo ceramic scanner moves a probe over the surface (or the sample under the probe) at a small distance with the high precision of 0.1 nm – 1 pm (near-field regime) General Principles of Scanning Probe Microscopy (SPM) an interaction between the probe and the surface is used to control the distance between the probe and the surface a feedback loop keeps the distance between the probe and the surface constant the voltage on the piezo element provides a 3D image of the scanned surface Scanning Force Microscopy (SFM) Characteristics of the Multimode SPM Multimode SPM SPM SPM Summary AFM enables minimally invasive investigations of surface topography measurements has to be performed on non sticky samples the resolution is about 1 nm (with a good tip) maximal lateral scan range is 120 μm maximal vertical scan range is about 5 μm no information about the chemical character of samples is avaliable typical surface investigation method (no information from the bulk) probing of further surface properties is possible: electric, magnetic STM ( local density of states (LDOS), only conductive surfaces) Torsion Resonance mode (TR mode) electrochemical microscopy (ECSTM and ECAFM) Further Application Modules further application modules can be obtained: SCM (scanning capacitance microscopy), SSRM (scanning spreading resistance), CAFM (conductive AFM), TUNA (tunneling AFM) SThM (scanning thermal microscope) nanoindenting/scratching heater/cooler for variable temperature applications (-40℃– 250℃) * * 1981/82 invention of the STM (Scanning Tunneling Mic