复合钒钼酸干凝胶薄膜的制备及其湿敏特性研究.PDF

第 18 卷 　第 4 期 传 感 技 术 学 报 Vol . 18 　N o . 4 2005 年 12 月 CHIN ES E J OU RNAL O F S EN SORS AND AC TUA TORS Dec . 2005 PolyVanadiumMolybdenum Acid Xerogel Thin Fil ms Fabricated by Solgel Process and Their Humidity Sensing Properties 1 2 3 L I L i , TON G M aos ong , W E N G A ih u a 1 S chool of Chem is t ry an d Chem ical Eng i neeri ng , D a Qi ng Pet roleum I ns t i t ute , H ei longj i ang D aqi ng 1633 18 , Chi na; 2 R D Center of Wel l L og g i ng Comp any , D aqi ng Pet roleum A d m i nis t rat i ve B u reau , H ei longj i ang D aqi ng 1634 12 , Chi na; 3 Col leg e of GeoE x p lorat ion S cience an d Technology , J i l i n Uni vers ity , J i l i n 130026 , Chi na Abstract :Polyvanadiummolyb denum acid xero gel t hin film s have been fabricat ed u sing V2 O5 and Mo pow der s a s t he p recur sor s by a solgel p roce ss. The co mpoun d ha s a layered st ruct ure . The valency of t he Mo an d V are Mo6 + an d V5 + , re sp ectively . The humidit y sen sing p rop ertie s of t he t hin film s are goo d in t he relative humidit y range 11 %～95 % , t he re sp on se time and t he recovery time are 6 s and 15 s , t he t emp era t ure error of t he humidit y i s 0 . 5 %R H/ ℃. Key words :p olyvanadiummolyb denum acid xero gel ; t hin film s ; solgel p roce ss ; humidit y sen sing p rop er tie s EEACC :7230 I ;0520 复合钒钼酸干凝胶薄膜的制备及其湿敏特性研究 1 2 3 李 　莉 ,童茂松 ,翁爱华