Co2Z软磁铁氧体薄膜的磁性能-磁性材料及器件专业情报网.PDF

研究·分析·实验 Co Z 软磁铁氧体薄膜的磁性能 2 郝思坤，黎 伟，孟卫民，白建民，杨 正，魏福林 (兰州大学 磁学与磁性材料教育部重点实验室 磁性材料研究所，甘肃兰州 730000) 摘 要：首先用球磨法制备了 Ba Co Fe O 铁氧体粉料，烧结后制得块体材料，然后以其为靶材，用射频 x 2 24 41 磁控溅射的方法在单晶硅基片上制备了膜厚为 100nm 的铁氧体薄膜。实验表明，沉积态的薄膜为非晶态结构， 经过高温热处理后形成了较好的磁铅石结构。研究了成分、热处理温度、氧分压对薄膜结构和磁性能的影响。 通过对热处理温度和氧分压的调整，制备出性能较好的 Ba 2 Co Fe O 薄膜，饱和磁化强度为 46.8A·m /kg ，矫 3 2 24 41 顽力为 7.3 kA/m。 关键词：Ba Co Fe O ；铁氧体；薄膜；溅射；热处理；磁性能 3 2 24 41 中图分类号：O484.4+3 文献标识码：A 文章编号：1001-3830(2011)03-0013-04 Magnetic properties of Co Z type ferrite thin films 2 HAO Si-kun, LI Wei, MENG Wei-ming, BAI Jian-min, YANG Zheng, WEI Fu-lin Key Laboratory for Magnetism and Magnetic Materials of the Ministry of Education, Research Institute of Magnetic Materials, School of Physical Science Technology, Lanzhou University, Lanzhou 730000, China Abstract: Firstly, powders of Ba Co Fe O ferrites were prepared by ball milling method and bulk materials x 2 24 41 were prepared by sintering the powders. Then the bulk materials were used as targets for this experiment. Ba Co Fe O ferrite films with thickness of 100 nm have been deposited on Si substrate by RF magnetron sputtering. 3 2 24 41 Experiments indicated that the as-deposited films were amorphous, after annealing in air at different temperatures magnetoplumbite phase was