利用单分子层掺杂技术并结合微波和CO2 雷射退火制作掺杂层小於5奈.PDF

CO 2 5 NANO COMMUNICATION 23 No. 1 33 CO2 5 Poly Si Junctionless Transistors with Sub- 5nm Conformally Doped Layers by Molecular Monolayer Doping and Microwave Incorporating CO2 Laser Annealing 1,2 1,2 1,2 1 1 1 1 1 1