PECVD试卷（PECVD test technique）.docVIP

PECVD试卷（PECVD test technique） 1. The RR system there are two kinds of heating module, respectively ___ __ __ infrared heating and the heating plate heat _____ _____ _____ ______. 2. PECVD is the abbreviation of Plasma, Enhanced, Chemical, Vapour, and water. PECVD Chinese name is called: plasma enhanced chemical meteorological deposition 3. The RR the nitrogen pressure can ___ _3-6 kg___ ___ ___ _3 cooling water pressure range - 5 pa___ _____. 4. The RR XXL machine USES the microwave power box and the magnetic control head power is ___ __3KW__ _____. 5. Vacuum switch in vacuum is greater than the _____1______ regarded as atmospheric conditions, less than ____0______ considered a vacuum. 6. The RR XXL process cavity and air duct has ____12____ root silane tube ___6_root ammonia pipe. 7 PECVD chemical reactive _ ____SiH4 + NH3 technique -- -- -- -- SixNyHz__________. 8 RR PECVD system technique is made up of which a few cavity __ feed cavity ______, ____ ____ ____, ____ process chamber heating chamber, ____ ____ cooling chamber, __ __________ the discharge chamber. 9 it is not conform to the requirements of the process is by measuring film refractive index _____ _____ __ and reflectivity _____ _____ 10 RR. The time is 96 hours. Now the RR breakrate should be controlled within one thousandth of one thousand. 1. The RR system there are two kinds of heating module, respectively heating ____ and ____ _____ _____ infrared heating plate heat _____ ______. 2. The vacuum requirements of PM process cavity are required to be pumped into ____2. 0 x e-2 mbar ____ can be loaded. 3. The actual alarm message of the card box is _____ transmission block. 4. Pecvd what is the full name of technique consists of plasma enhanced chemical vapor deposition ________________________. 5. Vacuum switch in vacuum is greater than ___1_____ and is considered to be atmospheric, less than ____0____, which is considered to be a vacuum state. 6. The process cavity special gas pipeline has ____12____ r