重复性晶圆搬运效率探讨A study of the efficiency in repetitive wafer.PDF

S-02 第十四屆人因工程學會年會暨學術研討會 重複性晶圓搬運效率探討 A study of the efficiency in repetitive wafer-handling tasks 張維益*、侯政亨、張立佑、洪子耕、陳秋妹、吳欣潔 朝陽科技大學 台中縣霧峰鄉吉峰東路 168號 S9215001@mail.cyut.edu.tw 摘要 縱使高科技產品在我們的生活中普遍化，但自動化搬運系統無法完全取代人工作業。有些工作需要 人為的操作，像人工物料搬運。本研究主要目的是提升工作效率，降低疲勞問題。為了瞭解晶圓搬運工 作的工作效率，本研究探討重量、搬運頻率和搬運距離對耗氧量、心搏率和能量效率的影響。然後尋找 200-mm 和 300-mm 晶圓合適的搬運條件 。實驗結果顯示，300-mm 晶圓 (9.5 kg) 在搬運頻率 2 次/分和 搬運距離 45 cm 時有最好的效率，而且此條件符合 NIOSH的搬運指引。200-mm 晶圓 (5.7 kg) 而言，搬 運頻率 4次/分和搬運距離 35 cm時有較佳的效率且無健康的問題。 關鍵詞 ：耗氧量、心搏率、能量效率 Abstract Although high tech products become popular in our life, the automation systems can not replace all the manual works. Some works still require manual operations, such as manual material handling (MMH). The main purpose of this study was to increase the work efficiency and reduce fatigue problems. In order to understand the work efficiency of wafer handling tasks, this study investigated the effects of weight, lifting frequency, and lifting distance on the oxygen consumption, heart rate and energy efficiency. Then suitable handling conditions for 200-mm and 300-mm wafer handling tasks were found. The experimental results indicated that the lifting frequency at 2 lift/min and lifting distance of 45 cm had best efficiency for handling 300-mm wafer (9.5 kg), and this condition accorded with NIOSH’s lifting guide. For the 200-mm wafer (5.7 kg), the lifting frequency of 4 lift/min and lifting distance of 35 cm led better efficiency and without health issues. Keywords: oxygen consumption, heart rate, energy efficiency 1. 背景與目的 模擬搬運實驗，試圖找出國人之最大可接受的負 在晶圓廠中有兩種重量不同的晶圓盒，一種 重做為 MMH 作業的指標，降低發生 MMH 作業造成 滿載 8吋晶圓的是 6k