金属氧化物气体传感器阵列的制备.pdfVIP

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金属氧化物气体传感器阵列的制备

18 1 Vol.18 No.1 2005 3 CHINESE JOURNAL OF SENSORS AND ACTUATORS Mar.2005 Fabrication of Metal-Oxide Semiconductor Gas-Sensor Array 1 2 2 LI Song , JAEGLE Martin , BOETTNER Harald 1.College of precision instrument and optical electronic engineering (I OEE), Tianjin University, Tianjin 300072, China; 2.Fraunhofer Institute of hysical Measurement, Heidenhof Str.8, 79110 Freiburg, Germany. Abstract : With four s

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