气体微流量测量及标准装置概论2（Introduction of gas micro flow measurement and standard device 2）.docVIP

气体微流量测量及标准装置概论2（Introduction of gas micro flow measurement and standard device 2） Introduction to gas micro flow measurement and standard device (2) time: 2010-03-10 source: Lanzhou Institute of physics editor: Li Wangkui - 4PaL/s, uncertainty 1%. The constant pressure flowmeter developed by SmeTana in 1966, compared with the structure shown in Figure 1 has two improvements: one is to adopt a servo mechanism, differential pressure gauge non zero output, automatic control by servo piston forward, so as to better maintain the P 0 constant, which greatly increases the accuracy. This design idea a