16×16光开关微镜阵列 A 16×16 Micro Mirror Array for Optical Switches.pdfVIP

V01．29 第29卷第8期 半 导 体 学 报 No．8 2008年8月 JOURNAL OFSEMICONDUCTORS Aug．，2008 A16X16Micro Mirror for Switches Optical Array Chen Hao Qinghua，Wu Guizhen，and Wengang’，WangZiqian，Yan Yilong (National ofMicro／NanoFabrication Microelectronics， KeyLaboratory Technology，Instituteof 100871，China) PekingUniversity，Belting Abstract：This onthe ofa mirror paperreports design，fabrication，andperformance array high．reflectivitylarge．rotation for x MEMS(micro-electro-mechanical16 switches．Themirrorinthe can itsrotationan— system)16 optical arrayenlarge a tosteer to90。and state the tothe behavior，anelectro- glesup keepsteady optical signal．Accordinglarge—rotation mechanicalmodelofthemirroris monolithic offiber andmirrorsfabricatedasur． presented．By integrationgrooves by faceandbulk coarse offiber—mirror—fibercanbeachieved．There． hybridmicromachiningprocess，thepassivealignment ofthemirrorisme