Development of Transparent Encapsulation （透明封装的发展）.pdf

SR14_012E S h i m a d z u R e v i e w Development of Transparent Encapsulation Films for OLEDs Using Surface Wave Plasma CVD System 1 2 2 by Kazufumi AZUMA, Ph.D. , Satoko UENO , and Yoshiyuki KONISHI Abstract We have succeeded in developing a highly transparent, water impermeable SiNx encapsulation films for organic light-emitting displays using a surface-wave-plasma enhanced chemical vapor deposition (SWP-CVD) system. A highly reliable barrier performance (no deterioration for more than five years under the room temperature) was realized with above SiNx film as an encapsulation of OLEDs. Keywords: Surface wave plasma (SWP), CVD, encapsulation, SiN, OLEDs 1. Introduction Microwaves are transmitted from the waveguide through the slotted array antenna to the dielectric window. Given an angular frequency ω, Due to their superior visibility, response time, power consumption, and dielectric window permittivity εs, light speed c, and wavenumber k, other characteristics compared to conventional LCDs, OLEDs have the microwave phase can be determined based on the following been attracting attention as the next-generation in flat panel display formula.